Profilometry Microscopy


    Zygo NewView 100 3D Imaging Surface Structure Analyzer

Principle of Operation

    Interferometry is a traditional technique in which a pattern of bright and dark lines (fringes) result from an optical path difference between a reference and a sample beam. The incoming light is split inside an interferometer, one beam going to an internal reference surface and the other to the sample. After reflection, the beams recombine inside the interferometer, undergoing constructive and destructive interference and producing the light and dark fringe pattern. A precision translation stage and a CCD camera together generate a 3D interferogram of the object that is stored in the computer memory. This 3D interferogram of the object is then transformed by frequency domain analysis into a quantitative 3D image providing surface structure analysis.


    • The paracentric tilt and tip stage with X and Y translation easily accommodates parts up to 150mm x 150mm x 100mm
    • Camera resolution: 320 x 240
    • Objectives: 10X and 40X
    • Field of view: 0.09mm x 0.065mm to 1.4mm x 1.06mm
    • Minimum lateral resolution: 0.36 μm to 2.92 μm
    • Minimum spatial sampling: 0.22 μm to 8.8 μm
    • Vertical resolution: 0.1nm
    • Instrument repeatability: 0.3nm Rq (mean + 2 sigma)
    • Maximum vertical step height: 100 μm range
    • Step height accuracy: 1.5%
    • Data acquisition time: 2.0 μm/sec
    • Transparent objects or coatings can be analyzed after being coated


    • Surface Roughness Quantification:  Examples
    • Step-Height Measurements to Measure Thin Film or Coating Thickness:  Examples
    • Peak-to-Valley Measurements
    • Sputter Rate Measurements
    • Wear Rate Measurements
    • 3-Dimensional Images of Surfaces – Flat, Cylindrical, and Spherical:  Examples
    • Solve friction problems
    • Evaluate surfaces for suitable adhesive bonding roughness
    • Solve vibration and noise problems
    • Solve fluid leakage and sealing problems
    • Address appearance issues
    • Surface roughness effects upon surface conductivity or resistance


See the Examples of White Light Interference Microscopy below:


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