Scanning White Light Interferometric Microscopy for Surface Topography, Profilometry, and Surface Roughness
Model
Zygo NewView 100 3D Imaging Surface Structure Analyzer
Principle of Operation
Interferometry is a traditional technique in which a pattern of bright and dark lines (fringes) result from an optical path difference between a reference and a sample beam. The incoming light is split inside an interferometer, one beam going to an internal reference surface and the other to the sample. After reflection, the beams recombine inside the interferometer, undergoing constructive and destructive interference and producing the light and dark fringe pattern. A precision translation stage and a CCD camera together generate a 3D interferogram of the object that is stored in the computer memory. This 3D interferogram of the object is then transformed by frequency domain analysis into a quantitative 3D image providing surface structure analysis.
Capabilities
The paracentric tilt and tip stage with X and Y translation easily accommodates parts up to 150mm x 150mm x 100mm
